Inventor
MINAMIDA JUNYA
JP14 patents
⚠️ This page may combine multiple inventors who share the name “MINAMIDA JUNYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS8033244B2Oct 11, 2011
Substrate processing system
TOKYO ELECTRON LTD12 citations82
US7485188B2Feb 3, 2009
Coating process method and coating process apparatus
TOKYO ELECTRON LTD9 citations81
US10373849B2Aug 6, 2019
Substrate processing apparatus
TOKYO ELECTRON LTD3 citations72
US11404295B2Aug 2, 2022
Substrate processing apparatus
TOKYO ELECTRON LTD2 citations71
US10056269B2Aug 21, 2018
Substrate liquid processing apparatus
TOKYO ELECTRON LTD6 citations64
US7918242B2Apr 5, 2011
Processing solution supply system, processing solution supply method and recording medium for storing processing solution supply control program
TOKYO ELECTRON LTD4 citations62
US9666463B2May 30, 2017
Substrate processing apparatus
TOKYO ELECTRON LTD1 citations52
US10186433B2Jan 22, 2019
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations51
US11670527B2Jun 6, 2023
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations49
US10128132B2Nov 13, 2018
Substrate liquid processing apparatus
TOKYO ELECTRON LTD0 citations47
US9842747B2Dec 12, 2017
Substrate liquid processing apparatus, exhaust switching unit and substrate liquid processing method
TOKYO ELECTRON LTD0 citations47
US11998954B2Jun 4, 2024
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations42