Inventor
HOSLER ERIK ROBERT
US5 patents
⚠️ This page may combine multiple inventors who share the name “HOSLER ERIK ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GLOBALFOUNDRIES INC
3 patentsUS9844124B2Dec 12, 2017
Method, apparatus and system for using free-electron laser compatible EUV beam for semiconductor wafer metrology
GLOBALFOUNDRIES INC3 citations69
US9541839B2Jan 10, 2017
Method and device for splitting a high-power light beam to provide simultaneous sub-beams to photolithography scanners
GLOBALFOUNDRIES INC4 citations68
US9392679B2Jul 12, 2016
Method, apparatus and system for using free-electron laser compatible EUV beam for semiconductor wafer processing
GLOBALFOUNDRIES INC2 citations57