Inventor
ASADA YASUO
JP6 patents
Patents
6 patentsUS11011383B2May 18, 2021
Etching method
TOKYO ELECTRON LTD0 citations61
US11784054B2Oct 10, 2023
Etching method and substrate processing system
TOKYO ELECTRON LTD0 citations59
US11373874B2Jun 28, 2022
Etching method and apparatus
TOKYO ELECTRON LTD0 citations59
US11342192B2May 24, 2022
Substrate processing method and storage medium
TOKYO ELECTRON LTD1 citations58
US11189498B2Nov 30, 2021
Method of etching silicon-containing film, computer-readable storage medium, and apparatus for etching silicon-containing film
TOKYO ELECTRON LTD1 citations55
US10665470B2May 26, 2020
Etching method and etching apparatus
TOKYO ELECTRON LTD0 citations49