Inventor
VATS VINAYAK VEER
US6 patents
⚠️ This page may combine multiple inventors who share the name “VATS VINAYAK VEER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS11217443B2Jan 4, 2022
Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates
APPLIED MATERIALS INC0 citations59
US11276570B2Mar 15, 2022
Multi-layer deposition and treatment of silicon nitride films
APPLIED MATERIALS INC0 citations50
US11157661B2Oct 26, 2021
Process development visualization tool
APPLIED MATERIALS INC0 citations49
US10950430B2Mar 16, 2021
Pulsed plasma deposition etch step coverage improvement
APPLIED MATERIALS INC0 citations46