Inventor

KAMATH SANJAY G

US7 patents

Patents

7 patents

US11538677B2Dec 27, 2022

Systems and methods for depositing high density and high tensile stress films

APPLIED MATERIALS INC0 citations60

US11217443B2Jan 4, 2022

Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates

APPLIED MATERIALS INC0 citations59

US11776835B2Oct 3, 2023

Power supply signal conditioning for an electrostatic chuck

APPLIED MATERIALS INC0 citations58

US11600468B2Mar 7, 2023

Multi channel splitter spool

APPLIED MATERIALS INC0 citations58

US12094709B2Sep 17, 2024

Plasma treatment process to densify oxide layers

APPLIED MATERIALS INC0 citations47

US10950430B2Mar 16, 2021

Pulsed plasma deposition etch step coverage improvement

APPLIED MATERIALS INC0 citations46

US12586767B2Mar 24, 2026

Multi-port cross flow system

APPLIED MATERIALS INC0 citations39