Inventor
DURAND WILLIAM JOHN
US5 patents
Patents
5 patentsUS12368024B2Jul 22, 2025
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC2 citations71
US12228534B2Feb 18, 2025
Capacitive sensor for monitoring gas concentration
APPLIED MATERIALS INC0 citations61
US11959868B2Apr 16, 2024
Capacitive sensor for monitoring gas concentration
APPLIED MATERIALS INC0 citations61
US10985009B2Apr 20, 2021
Methods to deposit flowable (gap-fill) carbon containing films using various plasma sources
APPLIED MATERIALS INC0 citations61
US11217443B2Jan 4, 2022
Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates
APPLIED MATERIALS INC0 citations59