Inventor
KALUTARAGE LAKMAL CHARIDU
US10 patents
Patents
10 patentsUS11621172B2Apr 4, 2023
Vapor phase thermal etch solutions for metal oxo photoresists
APPLIED MATERIALS INC2 citations71
US12068170B2Aug 20, 2024
Vapor phase thermal etch solutions for metal oxo photoresists
APPLIED MATERIALS INC0 citations61
US12033866B2Jul 9, 2024
Vapor phase thermal etch solutions for metal oxo photoresists
APPLIED MATERIALS INC0 citations61
US10985009B2Apr 20, 2021
Methods to deposit flowable (gap-fill) carbon containing films using various plasma sources
APPLIED MATERIALS INC0 citations61
US12300491B2May 13, 2025
Deposition of semiconductor integration films
APPLIED MATERIALS INC0 citations60
US11886120B2Jan 30, 2024
Deposition of semiconductor integration films
APPLIED MATERIALS INC1 citations60
US11562904B2Jan 24, 2023
Deposition of semiconductor integration films
APPLIED MATERIALS INC1 citations60
US12282256B2Apr 22, 2025
Photoresist deposition using independent multichannel showerhead
APPLIED MATERIALS INC0 citations59
US11217443B2Jan 4, 2022
Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates
APPLIED MATERIALS INC0 citations59
US12084764B2Sep 10, 2024
Vapor phase photoresists deposition
APPLIED MATERIALS INC0 citations49