Inventor
LI CHANGLING
US7 patents
⚠️ This page may combine multiple inventors who share the name “LI CHANGLING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS11217443B2Jan 4, 2022
Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates
APPLIED MATERIALS INC0 citations59
US12136538B2Nov 5, 2024
Deposition chamber system diffuser with increased power efficiency
APPLIED MATERIALS INC0 citations46
US10950430B2Mar 16, 2021
Pulsed plasma deposition etch step coverage improvement
APPLIED MATERIALS INC0 citations46