Inventor
MIURA TAKERU
JP8 patents
Patents
8 patentsUS11242934B2Feb 8, 2022
Valve device
FUJIKIN KK2 citations72
US11506295B2Nov 22, 2022
Valve device, fluid control device, fluid control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method
FUJIKIN KK2 citations71
US11402029B2Aug 2, 2022
Valve device, fluid control system, fluid control method, semiconductor manufacturing system, and semiconductor manufacturing method
FUJIKIN KK5 citations71
US11174949B2Nov 16, 2021
Actuator and valve device using the same
FUJIKIN KK2 citations70
US11859733B2Jan 2, 2024
Valve device, fluid control device, and manufacturing method of valve device
FUJIKIN KK0 citations62
US11261990B2Mar 1, 2022
Actuator and valve device
FUJIKIN KK0 citations61
US11073215B2Jul 27, 2021
Gas supply system
FUJIKIN KK0 citations50
US11047503B2Jun 29, 2021
Actuator, valve device, and fluid supply system
FUJIKIN KK0 citations50