Inventor

CHANG FENG-YI

TW141 patents

⚠️ This page may combine multiple inventors who share the name “CHANG FENG-YI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHANG FENG-YI

UNITED MICROELECTRONICS CORP

Method of fabricating metal gate structure

Semiconductor device and method for fabricating the same

Semiconductor structure having air gap between gate electrode and distal end portion of active area

Semiconductor device and method of forming the same

Self-aligned double patterning method

Semiconductor device and method of forming the same

Semiconductor memory device with bit line contact structure and method of forming the same

Semiconductor device and method for fabricating the same

Semiconductor device and method for fabricating the same

Device with reinforced metal gate spacer and method of fabricating

Semiconductor device having gate structure with doped hard mask

Semiconductor device having contact plug in two dielectric layers and two etch stop layers

Semiconductor structure and manufacturing method thereof

Semiconductor device and manufacturing methods thereof

Semiconductor device having metal gate and manufacturing method thereof

Semiconductor device with self-aligned contact and method of manufacturing the same

Metal gate structure

Method of forming contact hole and semiconductor structure with contact plug

Manufacturing method for forming a self aligned contact

Method for forming semiconductor structure having metal connection

Capacitor structure and fabrication method thereof

Buried word line structure and method of making the same

Method of forming a semiconductor device having a metal gate

Patterning method

Buried word line of a dynamic random access memory and method for fabricating the same

Method of forming semiconductor memory device

Method of manufacturing a capacitor

Semiconductor structure with capacitor landing pad and method of make the same

Semiconductor device and method for forming the same

Method of forming semiconductor device

Manufacturing method of semiconductor device

Buried word line of a dynamic random access memory and method for fabricating the same

Device with reinforced metal gate spacer and method of fabricating

Patterning method

Patterning method

Semiconductor device and method for fabricating the same

Method of fabricating semiconductor device

Method for fabricating a semiconductor device having gate structure with doped hard mask

Semiconductor device and method for fabricating the same

Semiconductor device and method for fabricating the same

Method for manufacturing semiconductor device having metal gate

Semiconductor device and manufacturing method thereof

Method for fabricating contact plug in an interlayer dielectric layer

Method of forming layout definition of semiconductor device

Buried word line structure and method of making the same

Semiconductor memory device and a manufacturing method thereof

Metal gate structure and method of making the same

Method of forming semiconductor device

Semiconductor memory device and manufacturing method thereof

CHANG FENG-YI

Method of fabricating openings and contact holes