Inventor

IM JI SOO

KR4 patents

Patents

4 patents

US10283382B2May 7, 2019

Plasma processing apparatus

SAMSUNG ELECTRONICS CO LTD9 citations82

US12437969B2Oct 7, 2025

Plasma processing equipment

SAMSUNG ELECTRONICS CO LTD0 citations58

US11501953B2Nov 15, 2022

Plasma processing equipment

SAMSUNG ELECTRONICS CO LTD0 citations58

US11521836B2Dec 6, 2022

Plasma processing apparatus

SAMSUNG ELECTRONICS CO LTD0 citations47