Inventor

ZHANG JINGCHUN

US36 patents

⚠️ This page may combine multiple inventors who share the name “ZHANG JINGCHUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZHANG JINGCHUN

APPLIED MATERIALS INC

Methods for etch of SiN films

Selective titanium nitride etching

Radical-component oxide etch

Selective etch of silicon by way of metastable hydrogen termination

Methods for etch of sin films

Dry-etch for silicon-and-carbon-containing films

Conformal oxide dry etch

Radical-component oxide etch

Selective titanium nitride etching

Conformal oxide dry etch

Dry etch process

Dry-etch for silicon-and-nitrogen-containing films

Methods for etch of metal and metal-oxide films

Selective etch for silicon films

Etch suppression with germanium

Procedure for etch rate consistency

Silicon-carbon-nitride selective etch

Procedure for etch rate consistency

Differential silicon oxide etch

Differential silicon oxide etch

Silicon selective removal

Silicon-selective removal

Methods and systems to enhance process uniformity

Systems and methods for improved performance in semiconductor processing

Selective suppression of dry-etch rate of materials containing both silicon and nitrogen

Methods and systems to enhance process uniformity

Hydrogen plasma based cleaning process for etch hardware

ZHANG JINGCHUN

Selective etch for silicon films

Methods for etch of metal and metal-oxide films

Methods for etch of sin films

Remotely-excited fluorine and water vapor etch

Dry-etch for silicon-and-carbon-containing films

WANG YUNYU

Selective suppression of dry-etch rate of materials containing both silicon and oxygen

Selective suppression of dry-etch rate of materials containing both silicon and nitrogen

WANG ANCHUAN

Selective etch of silicon by way of metastable hydrogen termination

Suzhou opple lighting co ltd

Spot lamp