Inventor
WANG YUNYU
US11 patents
⚠️ This page may combine multiple inventors who share the name “WANG YUNYU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS9236266B2Jan 12, 2016
Dry-etch for silicon-and-carbon-containing films
APPLIED MATERIALS INC153 citations99
US8642481B2Feb 4, 2014
Dry-etch for silicon-and-nitrogen-containing films
APPLIED MATERIALS INC188 citations99
US9034770B2May 19, 2015
Differential silicon oxide etch
APPLIED MATERIALS INC181 citations98
US9887096B2Feb 6, 2018
Differential silicon oxide etch
APPLIED MATERIALS INC113 citations97
US8541312B2Sep 24, 2013
Selective suppression of dry-etch rate of materials containing both silicon and nitrogen
APPLIED MATERIALS INC3 citations63