Inventor
BURKHART CHRISTOPHER W
US21 patents
⚠️ This page may combine multiple inventors who share the name “BURKHART CHRISTOPHER W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
17 patentsUS5238499AAug 24, 1993
Gas-based substrate protection during processing
NOVELLUS SYSTEMS INC411 citations99
US5230741AJul 27, 1993
Gas-based backside protection during substrate processing
NOVELLUS SYSTEMS INC118 citations98
US5882417AMar 16, 1999
Apparatus for preventing deposition on frontside peripheral region and edge of wafer in chemical vapor deposition apparatus
NOVELLUS SYSTEMS INC90 citations97
US5843233ADec 1, 1998
Exclusion guard and gas-based substrate protection for chemical vapor deposition apparatus
NOVELLUS SYSTEMS INC51 citations96
US5620525AApr 15, 1997
Apparatus for supporting a substrate and introducing gas flow doximate to an edge of the substrate
NOVELLUS SYSTEMS INC114 citations96
US5578532ANov 26, 1996
Wafer surface protection in a gas deposition process
NOVELLUS SYSTEMS INC91 citations96
US5374594ADec 20, 1994
Gas-based backside protection during substrate processing
NOVELLUS SYSTEMS INC56 citations96
US5925411AJul 20, 1999
Gas-based substrate deposition protection
NOVELLUS SYSTEMS INC72 citations95
US5769951AJun 23, 1998
Exclusion guard and gas-based substrate protection for chemical vapor deposition apparatus
NOVELLUS SYSTEMS INC51 citations95
US5425803AJun 20, 1995
Device for removing dissolved gas from a liquid
NOVELLUS SYSTEMS INC58 citations94
US6602346B1Aug 5, 2003
Gas-purged vacuum valve
NOVELLUS SYSTEMS INC56 citations93
US5772736AJun 30, 1998
Device for removing dissolved gas from a liquid
NOVELLUS SYSTEMS INC32 citations90
US5645625AJul 8, 1997
Device for removing dissolved gas from a liquid
NOVELLUS SYSTEMS INC24 citations90
US6682295B2Jan 27, 2004
Flatted object passive aligner
NOVELLUS SYSTEMS INC16 citations84
US6722665B1Apr 20, 2004
MESC seal, O-ring carrier
NOVELLUS SYSTEMS INC8 citations74
US7754014B2Jul 13, 2010
Gas-purged vacuum valve
NOVELLUS SYSTEMS INC5 citations71
US7585370B2Sep 8, 2009
Gas-purged vacuum valve
NOVELLUS SYSTEMS INC6 citations71