Inventor

YOUNG ROGER Y B

US4 patents

⚠️ This page may combine multiple inventors who share the name “YOUNG ROGER Y B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LSI LOGIC CORP

3 patents

US6495312B1Dec 17, 2002

Method and apparatus for removing photoresist edge beads from thin film substrates

LSI LOGIC CORP30 citations90

US6614507B2Sep 2, 2003

Apparatus for removing photoresist edge beads from thin film substrates

LSI LOGIC CORP14 citations82

US7183181B2Feb 27, 2007

Dynamic edge bead removal

LSI LOGIC CORP8 citations72

LSI CORP

1 patent

US7968859B2Jun 28, 2011

Wafer edge defect inspection using captured image analysis

LSI CORP27 citations87