Inventor

AHMED KHURSHID

US3 patents

Patents

3 patents

US6671294B2Dec 30, 2003

Laser spectral engineering for lithographic process

CYMER INC114 citations97

US7139301B2Nov 21, 2006

Laser spectral engineering for lithographic process

CYMER INC9 citations73

US7190707B2Mar 13, 2007

Gas discharge laser light source beam delivery unit

CYMER INC2 citations57