Inventor
HALAHAN PATRICK
US3 patents
⚠️ This page may combine multiple inventors who share the name “HALAHAN PATRICK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TRU SI TECHNOLOGIES INC
2 patentsUS6448153B2Sep 10, 2002
Thinning and dicing of semiconductor wafers using dry etch, and obtaining semiconductor chips with rounded bottom edges and corners
TRU SI TECHNOLOGIES INC30 citations91
US6749764B1Jun 15, 2004
Plasma processing comprising three rotational motions of an article being processed
TRU SI TECHNOLOGIES INC5 citations61