Inventor
HAYASAKI TETSUZI
JP4 patents
Patents
4 patentsUS6916559B2Jul 12, 2005
Ceramic material resistant to halogen plasma and member utilizing the same
KYOCERA CORP401 citations98
US6447937B1Sep 10, 2002
Ceramic materials resistant to halogen plasma and components using the same
KYOCERA CORP511 citations98
US7584631B2Sep 8, 2009
Member for supporting magnetic disc substrates, process of producing the same, and magnetic disc device using the same
KYOCERA CORP0 citations50
US7179550B2Feb 20, 2007
Member for supporting magnetic disc substrates, process of producing the same, and magnetic disc device using the same
KYOCERA CORP0 citations50