Inventor

BUTT SHAHID

US18 patents

⚠️ This page may combine multiple inventors who share the name “BUTT SHAHID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BUTT SHAHID

INFINEON TECHNOLOGIES AG

Semiconductor device fabrication using a photomask with assist features

Semiconductor device fabrication using a photomask designed using modeling and empirical testing

Single exposure of mask levels having a lines and spaces array using alternating phase-shift mask

Mask and method for patterning a semiconductor wafer

Grating patterns and method for determination of azimuthal and radial aberration

Method of forming a self aligned trench in a semiconductor using a patterned sacrificial layer for defining the trench opening

System and method for quantifying errors in an alternating phase shift mask

Method of reducing pitch on semiconductor wafer

Mask for projecting a structure pattern onto a semiconductor substrate

Phase-shift mask

INFINEON TECHNOLOGIES CORP

Method and apparatus for amplitude filtering in the frequency plane of a lithographic projection system

Dynamic random access memory

Semiconductor structures and manufacturing methods

Dynamic random access memory cell layout

SIEMENS AG

Top layer imaging lithography for semiconductor processing

Extrusion enhanced mask for improving process window

IBM

Critical dimension control of printed features using non-printing fill patterns

Infrared debond damage mitigation by copper fill pattern