Inventor
GARCIA ANDRES B
US4 patents
Patents
4 patentsUS7338569B2Mar 4, 2008
Method and system of using offset gage for CMP polishing pad alignment and adjustment
AGERE SYSTEMS INC2 citations58
US7172496B1Feb 6, 2007
Method and apparatus for cleaning slurry depositions from a water carrier
AGERE SYSTEMS INC3 citations58
US7527544B2May 5, 2009
System of using offset gage for CMP polishing pad alignment and adjustment
AGERE SYSTEMS INC0 citations48
US7033257B2Apr 25, 2006
Carrier head for chemical mechanical polishing
AGERE SYSTEMS INC0 citations37