Inventor
CIPLICKAS DENNIS J
US14 patents
Patents
14 patentsUS9496119B1Nov 15, 2016
E-beam inspection apparatus and method of using the same on various integrated circuit chips
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US6901564B2May 31, 2005
System and method for product yield prediction
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US6834375B1Dec 21, 2004
System and method for product yield prediction using a logic characterization vehicle
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US6449749B1Sep 10, 2002
System and method for product yield prediction
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US7174521B2Feb 6, 2007
System and method for product yield prediction
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US7673262B2Mar 2, 2010
System and method for product yield prediction
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US7373625B2May 13, 2008
System and method for product yield prediction
PDF SOLUTIONS INC12 citations92
US7356800B2Apr 8, 2008
System and method for product yield prediction
PDF SOLUTIONS INC15 citations92
US7197726B2Mar 27, 2007
Test structures for estimating dishing and erosion effects in copper damascene technology
PDF SOLUTIONS INC11 citations82
US7024642B2Apr 4, 2006
Extraction method of defect density and size distributions
PDF SOLUTIONS INC16 citations82
US7348594B2Mar 25, 2008
Test structures and models for estimating the yield impact of dishing and/or voids
PDF SOLUTIONS INC12 citations79
US7395518B2Jul 1, 2008
Back end of line clone test vehicle
PDF SOLUTIONS INC6 citations63
US7154115B2Dec 26, 2006
Zoom in pin nest structure, test vehicle having the structure, and method of fabricating the structure
PDF SOLUTIONS INC4 citations62
US9793090B2Oct 17, 2017
E-beam inspection apparatus and method of using the same on various integrated circuit chips
PDF SOLUTIONS INC1 citations52