Inventor
SHITE HIDEO
JP9 patents
Patents
9 patentsUS7575634B2Aug 18, 2009
Coating device and coating film forming method
TOKYO ELECTRON LTD11 citations81
US7790227B2Sep 7, 2010
Coating process apparatus and coating film forming method
TOKYO ELECTRON LTD6 citations70
US10121685B2Nov 6, 2018
Treatment solution supply method, non-transitory computer-readable storage medium, and treatment solution supply apparatus
TOKYO ELECTRON LTD5 citations68
US11664249B2May 30, 2023
Substrate processing apparatus, substrate processing method, and recording medium
TOKYO ELECTRON LTD2 citations66
US10518199B2Dec 31, 2019
Treatment solution supply apparatus
TOKYO ELECTRON LTD1 citations60
US11465168B2Oct 11, 2022
Liquid processing device and liquid processing method
TOKYO ELECTRON LTD0 citations51
US12032294B2Jul 9, 2024
Abnormality detection device of chemical solution, liquid processing device, substrate processing apparatus, abnormality detection method of chemical solution, liquid processing method, and substrate processing method
TOKYO ELECTRON LTD0 citations50
US11433420B2Sep 6, 2022
Solution supply apparatus and solution supply method
TOKYO ELECTRON LTD0 citations45
US7384595B2Jun 10, 2008
Heat-treating apparatus and heat-treating method
TOKYO ELECTRON LTD0 citations38