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Inventor
BELIN DANIEL L
US
3 patents
⚠️ This page may combine multiple inventors who share the name “BELIN DANIEL L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
2 patents
US7835015B1
Nov 16, 2010
Auto focus system for reticle inspection
KLA TENCOR CORP
11 citations
82
US9110039B2
Aug 18, 2015
Auto-focus system and methods for die-to-die inspection
KLA TENCOR CORP
3 citations
54
WRIGHT MICHAEL J
1 patent
US8928895B2
Jan 6, 2015
Auto focus system for reticle inspection
WRIGHT MICHAEL J
0 citations
43