Inventor
KAMIDI RAMIDIN IZAIR
NL13 patents
⚠️ This page may combine multiple inventors who share the name “KAMIDI RAMIDIN IZAIR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
9 patentsUS7782446B2Aug 24, 2010
Stage system and lithographic apparatus comprising such stage system
ASML NETHERLANDS BV13 citations83
US9927721B2Mar 27, 2018
Object positioning system, control system, lithographic apparatus, object positioning method and device manufacturing method
ASML NETHERLANDS BV2 citations68
US7657334B2Feb 2, 2010
Lithographic apparatus and control method
ASML NETHERLANDS BV3 citations60
US7576832B2Aug 18, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations59
US11774865B2Oct 3, 2023
Method of controlling a position of a first object relative to a second object, control unit, lithographic apparatus and apparatus
ASML NETHERLANDS BV0 citations58
US8014881B2Sep 6, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations57
US7453228B2Nov 18, 2008
Method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device
ASML NETHERLANDS BV2 citations56
US9715182B2Jul 25, 2017
Lithographic apparatus, substrate support system, device manufacturing method and control program
ASML NETHERLANDS BV1 citations45
US10120293B2Nov 6, 2018
Object positioning in lithography
ASML NETHERLANDS BV0 citations34