Inventor
AADAMOV ANATOLY
US5 patents
Patents
5 patentsUS8719739B2May 6, 2014
Method and system for forming patterns using charged particle beam lithography
D2S INC22 citations90
US9400857B2Jul 26, 2016
Method and system for forming patterns using charged particle beam lithography
D2S INC5 citations81
US8959463B2Feb 17, 2015
Method and system for dimensional uniformity using charged particle beam lithography
D2S INC5 citations72
US10031413B2Jul 24, 2018
Method and system for forming patterns using charged particle beam lithography
D2S INC3 citations70
US9104109B2Aug 11, 2015
Method and system for improving critical dimension uniformity using shaped beam lithography
D2S INC2 citations61