Inventor
KHALIULLIN ELDAR
US3 patents
Patents
3 patentsUS8719739B2May 6, 2014
Method and system for forming patterns using charged particle beam lithography
D2S INC22 citations90
US9400857B2Jul 26, 2016
Method and system for forming patterns using charged particle beam lithography
D2S INC5 citations81
US10031413B2Jul 24, 2018
Method and system for forming patterns using charged particle beam lithography
D2S INC3 citations70