Inventor

VOZNYI OLEG VIACHESLAVOVICH

NL4 patents

⚠️ This page may combine multiple inventors who share the name “VOZNYI OLEG VIACHESLAVOVICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIENHUYS HAN-KWANG

2 patents

US8730448B2May 20, 2014

Lithographic apparatus and device manufacturing method

NIENHUYS HAN-KWANG9 citations80

US8797504B2Aug 5, 2014

Lithographic apparatus and device manufacturing method

NIENHUYS HAN-KWANG1 citations48

BEST KEITH FRANK

1 patent

US8576374B2Nov 5, 2013

Lithographic apparatus and method

BEST KEITH FRANK3 citations54

ASML NETHERLANDS BV

1 patent

US11860554B2Jan 2, 2024

Object positioner, method for correcting the shape of an object, lithographic apparatus, object inspection apparatus, device manufacturing method

ASML NETHERLANDS BV0 citations53