Inventor

SCHMITZ ROGER WILHELMUS ANTONIUS HENRICUS

NL7 patents

⚠️ This page may combine multiple inventors who share the name “SCHMITZ ROGER WILHELMUS ANTONIUS HENRICUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIENHUYS HAN-KWANG

3 patents

US8730448B2May 20, 2014

Lithographic apparatus and device manufacturing method

NIENHUYS HAN-KWANG9 citations80

US8970818B2Mar 3, 2015

Lithographic apparatus and component with repeating structure having increased thermal accommodation coefficient

NIENHUYS HAN-KWANG5 citations68

US8797504B2Aug 5, 2014

Lithographic apparatus and device manufacturing method

NIENHUYS HAN-KWANG1 citations48

ASML NETHERLANDS BV

3 patents

US9494875B2Nov 15, 2016

Chuck, a chuck control system, a lithography apparatus and a method of using a chuck

ASML NETHERLANDS BV4 citations70

US9429857B2Aug 30, 2016

Electrostatic clamp, lithographic apparatus and method

ASML NETHERLANDS BV1 citations48

US10877384B1Dec 29, 2020

Radiation shielding device and apparatus comprising such shielding device

ASML NETHERLANDS BV0 citations30

SCHMITZ ROGER WILHELMUS ANTONIUS HENRICUS

1 patent

US9176398B2Nov 3, 2015

Method and system for thermally conditioning an optical element

SCHMITZ ROGER WILHELMUS ANTONIUS HENRICUS1 citations36