Inventor
LEROUX ALAIN LOUIS CLAUDE
NL6 patents
⚠️ This page may combine multiple inventors who share the name “LEROUX ALAIN LOUIS CLAUDE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
3 patentsUS10747127B2Aug 18, 2020
Lithographic apparatus
ASML NETHERLANDS BV5 citations68
US11287752B2Mar 29, 2022
Cooling apparatus and plasma-cleaning station for cooling apparatus
ASML NETHERLANDS BV0 citations57
US11681233B2Jun 20, 2023
Gas mixing for fast temperature control of a cooling hood
ASML NETHERLANDS BV0 citations53