Inventor

CAMARGO FRANCISCO

AT3 patents

⚠️ This page may combine multiple inventors who share the name “CAMARGO FRANCISCO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES AG

2 patents

US9799539B2Oct 24, 2017

Method and apparatus for liquid treatment of wafer shaped articles

LAM RES AG4 citations65

US9616451B2Apr 11, 2017

Apparatus for processing wafer-shaped articles

LAM RES AG0 citations29

LAM RES CORP

1 patent

US7977123B2Jul 12, 2011

Arrangements and methods for improving bevel etch repeatability among substrates

LAM RES CORP4 citations59