Inventor

SCHINDLER KATRIN

DE2 patents

⚠️ This page may combine multiple inventors who share the name “SCHINDLER KATRIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUSS MICROTEC LITHOGRAPHY GMBH

1 patent

US9824909B2Nov 21, 2017

Chuck, in particular for use in a mask aligner

SUSS MICROTEC LITHOGRAPHY GMBH0 citations45

SUSS MICROOPTICS SA

1 patent

US11630026B2Apr 18, 2023

Method and test system for assessing the quality of a multi-channel micro- and/or subwavelength-optical projection unit

SUSS MICROOPTICS SA0 citations35