Inventor
CHIANG TONY P
US158 patents
⚠️ This page may combine multiple inventors who share the name “CHIANG TONY P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTERMOLECULAR INC
21 patentsUS7309658B2Dec 18, 2007
Molecular self-assembly in substrate processing
INTERMOLECULAR INC97 citations99
US7544574B2Jun 9, 2009
Methods for discretized processing of regions of a substrate
INTERMOLECULAR INC38 citations96
US7902063B2Mar 8, 2011
Methods for discretized formation of masking and capping layers on a substrate
INTERMOLECULAR INC15 citations93
US9362231B2Jun 7, 2016
Molecular self-assembly in substrate processing
INTERMOLECULAR INC9 citations92
US8766234B1Jul 1, 2014
Current selector for non-volatile memory in a cross bar array based on defect and band engineering metal-dielectric-metal stacks
INTERMOLECULAR INC28 citations92
US8011317B2Sep 6, 2011
Advanced mixing system for integrated tool having site-isolated reactors
INTERMOLECULAR INC23 citations92
US9362497B2Jun 7, 2016
Reduction of forming voltage in semiconductor devices
INTERMOLECULAR INC6 citations84
US9070867B2Jun 30, 2015
Non-volatile resistive-switching memories
INTERMOLECULAR INC5 citations84
US9054307B2Jun 9, 2015
Resistive random access memory cells having metal alloy current limiting layers
INTERMOLECULAR INC6 citations84
US9025360B2May 5, 2015
Method for improving data retention of ReRAM chips operating at low operating temperatures
INTERMOLECULAR INC6 citations84
US8981332B2Mar 17, 2015
Nonvolatile resistive memory element with an oxygen-gettering layer
INTERMOLECULAR INC10 citations84
US8890109B2Nov 18, 2014
Resistive random access memory access cells having thermally isolating structures
INTERMOLECULAR INC7 citations84
US8872151B2Oct 28, 2014
Surface treatment to improve resistive-switching characteristics
INTERMOLECULAR INC5 citations84
US8872268B2Oct 28, 2014
Controlled localized defect paths for resistive memories
INTERMOLECULAR INC4 citations84
US8852996B2Oct 7, 2014
Carbon doped resistive switching layers
INTERMOLECULAR INC7 citations84
US8821987B2Sep 2, 2014
Combinatorial processing using a remote plasma source
INTERMOLECULAR INC8 citations84
US8817524B2Aug 26, 2014
Resistive random access memory cells having metal alloy current limiting layers
INTERMOLECULAR INC11 citations84
US8809159B2Aug 19, 2014
Radiation enhanced resistive switching layers
INTERMOLECULAR INC8 citations84
US8648418B2Feb 11, 2014
Controlled localized defect paths for resistive memories
INTERMOLECULAR INC7 citations84
US8531868B2Sep 10, 2013
Bipolar resistive-switching memory with a single diode per memory cell
INTERMOLECULAR INC5 citations84
US7871928B2Jan 18, 2011
Methods for discretized processing of regions of a substrate
INTERMOLECULAR INC8 citations84
NOVELLUS SYSTEMS INC
7 patentsUS6878402B2Apr 12, 2005
Method and apparatus for improved temperature control in atomic layer deposition
NOVELLUS SYSTEMS INC499 citations99
US6800173B2Oct 5, 2004
Variable gas conductance control for a process chamber
NOVELLUS SYSTEMS INC134 citations98
US6949450B2Sep 27, 2005
Method for integrated in-situ cleaning and subsequent atomic layer deposition within a single processing chamber
NOVELLUS SYSTEMS INC44 citations93
US7806983B2Oct 5, 2010
Substrate temperature control in an ALD reactor
NOVELLUS SYSTEMS INC24 citations92
US7318869B2Jan 15, 2008
Variable gas conductance control for a process chamber
NOVELLUS SYSTEMS INC32 citations92
US7189432B2Mar 13, 2007
Varying conductance out of a process region to control gas flux in an ALD reactor
NOVELLUS SYSTEMS INC36 citations92
US7871676B2Jan 18, 2011
System for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD)
NOVELLUS SYSTEMS INC13 citations84
CHIANG TONY P
6 patentsUS8440259B2May 14, 2013
Vapor based combinatorial processing
CHIANG TONY P539 citations99
US8334015B2Dec 18, 2012
Vapor based combinatorial processing
CHIANG TONY P22 citations93
US8163631B2Apr 24, 2012
Methods for discretized processing and process sequence integration of regions of a substrate
CHIANG TONY P15 citations92
US8084400B2Dec 27, 2011
Methods for discretized processing and process sequence integration of regions of a substrate
CHIANG TONY P16 citations92
US8409354B2Apr 2, 2013
Vapor based combinatorial processing
CHIANG TONY P14 citations91
US8658997B2Feb 25, 2014
Bipolar multistate nonvolatile memory
CHIANG TONY P4 citations84
ANGSTRON SYSTEMS INC
4 patentsUS6569501B2May 27, 2003
Sequential method for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD)
ANGSTRON SYSTEMS INC238 citations99
US6428859B1Aug 6, 2002
Sequential method for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD)
ANGSTRON SYSTEMS INC810 citations99
US6416822B1Jul 9, 2002
Continuous method for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD)
ANGSTRON SYSTEMS INC416 citations99
US6630201B2Oct 7, 2003
Adsorption process for atomic layer deposition
ANGSTRON SYSTEMS INC337 citations98
APPLIED MATERIALS INC
4 patentsUS6398929B1Jun 4, 2002
Plasma reactor and shields generating self-ionized plasma for sputtering
APPLIED MATERIALS INC128 citations98
US6582569B1Jun 24, 2003
Process for sputtering copper in a self ionized plasma
APPLIED MATERIALS INC75 citations97
US6413383B1Jul 2, 2002
Method for igniting a plasma in a sputter reactor
APPLIED MATERIALS INC92 citations97
US6893541B2May 17, 2005
Multi-step process for depositing copper seed layer in a via
APPLIED MATERIALS INC51 citations95
SHANKER SUNIL
3 patentsUS8726838B2May 20, 2014
Combinatorial plasma enhanced deposition and etch techniques
SHANKER SUNIL5 citations84
US8153535B1Apr 10, 2012
Combinatorial plasma enhanced deposition techniques
SHANKER SUNIL8 citations84
US8148273B1Apr 3, 2012
Combinatorial plasma enhanced deposition techniques
SHANKER SUNIL6 citations84
WANG YUN
2 patentsKUMAR PRAGATI
1 patentPRAMANIK DIPANKAR
1 patentLEE ALBERT
1 patentShowing the top 50 of 158 patents by PatentIndex Score.