Inventor
KURIBAYASHI AKIHIRO
JP11 patents
⚠️ This page may combine multiple inventors who share the name “KURIBAYASHI AKIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS11201053B2Dec 14, 2021
Film forming method and film forming apparatus
TOKYO ELECTRON LTD1 citations60
US10714332B2Jul 14, 2020
Film forming method and film forming apparatus
TOKYO ELECTRON LTD1 citations60
US11473194B2Oct 18, 2022
Cleaning method of deposition apparatus
TOKYO ELECTRON LTD0 citations51
US9892909B2Feb 13, 2018
Film forming method and film forming apparatus
TOKYO ELECTRON LTD1 citations51
US12077855B2Sep 3, 2024
Cleaning method and film deposition apparatus
TOKYO ELECTRON LTD0 citations50
US9922820B2Mar 20, 2018
Film forming method and film forming apparatus
TOKYO ELECTRON LTD1 citations50
SHINKO ELECTRIC IND CO
4 patentsUS9019684B2Apr 28, 2015
Electrostatic chuck and method for manufacturing electrostatic chuck
SHINKO ELECTRIC IND CO8 citations81
US11869793B2Jan 9, 2024
Electrostatic chuck and substrate fixing device
SHINKO ELECTRIC IND CO0 citations61
US12432819B2Sep 30, 2025
Substrate fixing device
SHINKO ELECTRIC IND CO0 citations46
US10090176B2Oct 2, 2018
Temperature adjustment device
SHINKO ELECTRIC IND CO0 citations39