Inventor
OTSUKI SHIMON
JP7 patents
Patents
7 patentsUS10438791B2Oct 8, 2019
Film forming method, film forming apparatus, and storage medium
TOKYO ELECTRON LTD2 citations71
US10900121B2Jan 26, 2021
Method of manufacturing semiconductor device and apparatus of manufacturing semiconductor device
TOKYO ELECTRON LTD0 citations61
US11201053B2Dec 14, 2021
Film forming method and film forming apparatus
TOKYO ELECTRON LTD1 citations60
US10714332B2Jul 14, 2020
Film forming method and film forming apparatus
TOKYO ELECTRON LTD1 citations60
US11171014B2Nov 9, 2021
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations50
US11970768B2Apr 30, 2024
Film forming method and film forming apparatus
TOKYO ELECTRON LTD0 citations47
US10550470B2Feb 4, 2020
Film forming apparatus and operation method of film forming apparatus
TOKYO ELECTRON LTD0 citations40