Inventor
NAKASATO YUKA
JP4 patents
Patents
4 patentsUS11526160B2Dec 13, 2022
Failure detection system and failure detection method
TOKYO ELECTRON LTD2 citations68
US11492702B2Nov 8, 2022
Film-forming apparatus and film-forming method
TOKYO ELECTRON LTD0 citations48
US12334374B2Jun 17, 2025
Abnormality detecting apparatus, semiconductor manufacturing apparatus, and abnormality detecting method
TOKYO ELECTRON LTD0 citations43
US10731255B2Aug 4, 2020
Film forming method
TOKYO ELECTRON LTD0 citations38