Inventor
KUEHNEL MATTHIAS
DE11 patents
Patents
11 patentsUS10913652B2Feb 9, 2021
Micromechanical z-inertial sensor
BOSCH GMBH ROBERT0 citations61
US11719539B2Aug 8, 2023
Micromechanical component for a yaw rate sensor and corresponding production method
BOSCH GMBH ROBERT1 citations59
US11365969B2Jun 21, 2022
MEMS device including spurious mode suppression and corresponding operating method
BOSCH GMBH ROBERT0 citations59
US11417552B2Aug 16, 2022
Method and device for determining a feature for devices produced on a wafer
BOSCH GMBH ROBERT0 citations53
US12146763B2Nov 19, 2024
Inertial sensor and computer-implemented method for self-calibration of an inertial sensor
BOSCH GMBH ROBERT0 citations49
US11988511B2May 21, 2024
Micromechanical component for a rotation rate sensor and corresponding manufacturing method
BOSCH GMBH ROBERT0 citations48
US11953323B2Apr 9, 2024
Micromechanical rate-of-rotation sensor set-up, rate-of-rotation sensor array and corresponding manufacturing method
BOSCH GMBH ROBERT0 citations48
US11466985B2Oct 11, 2022
Rotation-rate sensor, method for producing a rotation-rate sensor
BOSCH GMBH ROBERT0 citations48
US11421991B2Aug 23, 2022
Yaw-rate sensor with a substrate having a main extension plane, method for manufacturing a yaw-rate sensor
BOSCH GMBH ROBERT0 citations48
US11226202B2Jan 18, 2022
Three-axis micromechanical rotation rate sensor system including linearly and rotatorily drivable sensor units
BOSCH GMBH ROBERT0 citations47
US10900785B2Jan 26, 2021
Micromechanical rotational rate sensor system and corresponding production method
BOSCH GMBH ROBERT0 citations47