Inventor
BODE NIELS
DE7 patents
Patents
7 patentsUS11365969B2Jun 21, 2022
MEMS device including spurious mode suppression and corresponding operating method
BOSCH GMBH ROBERT0 citations59
US11099013B2Aug 24, 2021
One-axis and two-axis rotation rate sensor
BOSCH GMBH ROBERT1 citations59
US11953323B2Apr 9, 2024
Micromechanical rate-of-rotation sensor set-up, rate-of-rotation sensor array and corresponding manufacturing method
BOSCH GMBH ROBERT0 citations48
US11466985B2Oct 11, 2022
Rotation-rate sensor, method for producing a rotation-rate sensor
BOSCH GMBH ROBERT0 citations48
US11421991B2Aug 23, 2022
Yaw-rate sensor with a substrate having a main extension plane, method for manufacturing a yaw-rate sensor
BOSCH GMBH ROBERT0 citations48
US11226202B2Jan 18, 2022
Three-axis micromechanical rotation rate sensor system including linearly and rotatorily drivable sensor units
BOSCH GMBH ROBERT0 citations47
US10900785B2Jan 26, 2021
Micromechanical rotational rate sensor system and corresponding production method
BOSCH GMBH ROBERT0 citations47