Inventor
MASUI TATSUYA
JP9 patents
Patents
9 patentsUS11322415B2May 3, 2022
Substrate treatment method and substrate treatment device
SCREEN HOLDINGS CO LTD3 citations71
US10985038B2Apr 20, 2021
Determination method and substrate processing equipment
SCREEN HOLDINGS CO LTD6 citations71
US10651064B2May 12, 2020
Substrate treatment device and substrate treatment method
SCREEN HOLDINGS CO LTD2 citations71
US11908752B2Feb 20, 2024
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD1 citations61
US11646212B2May 9, 2023
Substrate treatment device
SCREEN HOLDINGS CO LTD0 citations61
US11011398B2May 18, 2021
Fume determination method, substrate processing method, and substrate processing equipment
SCREEN HOLDINGS CO LTD0 citations61
US12478997B2Nov 25, 2025
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations58
US12278083B2Apr 15, 2025
Substrate holder state detection device and substrate holder state detection method
SCREEN HOLDINGS CO LTD0 citations48
US12293492B2May 6, 2025
Substrate processing apparatus and monitoring method in substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations45