Inventor
MINAMI TOSHIHIKO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “MINAMI TOSHIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
5 patentsUS5338363AAug 16, 1994
Chemical vapor deposition method, and chemical vapor deposition treatment system and chemical vapor deposition apparatus therefor
MITSUBISHI ELECTRIC CORP113 citations95
US4894510AJan 16, 1990
Apparatus for uniformly distributing plasma over a substrate
MITSUBISHI ELECTRIC CORP58 citations95
US4947085AAug 7, 1990
Plasma processor
MITSUBISHI ELECTRIC CORP48 citations92
US5077238ADec 31, 1991
Method of manufacturing a semiconductor device with a planar interlayer insulating film
MITSUBISHI ELECTRIC CORP37 citations91
US5425812AJun 20, 1995
Reaction chamber for a chemical vapor deposition apparatus and a chemical vapor deposition apparatus using such a reaction chamber
MITSUBISHI ELECTRIC CORP39 citations87