Inventor

WELLERDIECK KLAUS

CH7 patents

⚠️ This page may combine multiple inventors who share the name “WELLERDIECK KLAUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BALZERS HOCHVAKUUM

4 patents

US6176979B1Jan 23, 2001

(unassigned)

1 patent

US6878248B2Apr 12, 2005

Method of manufacturing an object in a vacuum recipient

46 citations94

UNAXIS BALZERS AG

1 patent

US6248219B1Jun 19, 2001

Process and apparatus for sputter etching or sputter coating

UNAXIS BALZERS AG55 citations88

BALZERS AKTIENGSELLSCHAFT

1 patent

US5948224ASep 7, 1999

Method of controlling a treatment process and vacuum treatment apparatus

BALZERS AKTIENGSELLSCHAFT23 citations88

WELLERDIECK KLAUS

BALZERS HOCHVAKUUM

Method of manufacturing an object in a vacuum recipient

Etching or coating method and a plant therefor

Vacuum treatment apparatus

Feed through for application of hf energy

(unassigned)

Method of manufacturing an object in a vacuum recipient

UNAXIS BALZERS AG

Process and apparatus for sputter etching or sputter coating

BALZERS AKTIENGSELLSCHAFT

Method of controlling a treatment process and vacuum treatment apparatus