Inventor
ORPANA MARKKU
FI5 patents
⚠️ This page may combine multiple inventors who share the name “ORPANA MARKKU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VAISALA OY
2 patentsUS5561523AOct 1, 1996
Electrically tunable fabry-perot interferometer produced by surface micromechanical techniques for use in optical material analysis
VAISALA OY229 citations98
US5646729AJul 8, 1997
Single-channel gas concentration measurement method and apparatus using a short-resonator Fabry-Perot interferometer
VAISALA OY209 citations97