Inventor
MOSZKOWICZ LEON
US6 patents
Patents
6 patentsUS6198300B1Mar 6, 2001
Silicided silicon microtips for scanning probe microscopy
IBM87 citations95
US6139759AOct 31, 2000
Method of manufacturing silicided silicon microtips for scanning probe microscopy
IBM53 citations93
US7205237B2Apr 17, 2007
Apparatus and method for selected site backside unlayering of si, GaAs, GaxAlyAszof SOI technologies for scanning probe microscopy and atomic force probing characterization
IBM15 citations80
US7812347B2Oct 12, 2010
Integrated circuit and methods of measurement and preparation of measurement structure
IBM2 citations59
US7944550B2May 17, 2011
System and method for detecting local mechanical stress in integreated devices
IBM2 citations54
US7507591B2Mar 24, 2009
Methods of measurement and preparation of measurement structure of integrated circuit
IBM0 citations48