Inventor
IKENOUCHI KATSUYUKI
JP4 patents
Patents
4 patentsUS7102206B2Sep 5, 2006
Semiconductor substrate, method for fabricating the same, and method for fabricating semiconductor device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD15 citations89
US6251000B1Jun 26, 2001
Substrate holder, method for polishing substrate, and method for fabricating semiconductor device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD7 citations71
US7393759B2Jul 1, 2008
Semiconductor substrate, method for fabricating the same, and method for fabricating semiconductor device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD1 citations49
US7331843B2Feb 19, 2008
Substrate polishing method and method of manufacturing semiconductor device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD1 citations36