Inventor
VAN GROOS PIETER JOHANNES MARI
NL3 patents
Patents
3 patentsUS7145643B2Dec 5, 2006
Interface unit, lithographic projection apparatus comprising such an interface unit and a device manufacturing method
ASML NETHERLANDS BV11 citations79
US7173270B1Feb 6, 2007
Detector system for detecting a height of a particle, and lithographic apparatus and device manufacturing method including the same.
ASML NETHERLANDS BV15 citations76
US7123349B2Oct 17, 2006
Lithographic projection assembly, substrate handling apparatus and substrate handling method
ASML NETHERLANDS BV5 citations60