Inventor
KLOMP ALBERT JAN HENDRIK
NL5 patents
Patents
5 patentsUS7359031B2Apr 15, 2008
Lithographic projection assembly, load lock and method for transferring objects
ASML NETHERLANDS BV12 citations80
US7878755B2Feb 1, 2011
Load lock and method for transferring objects
ASML NETHERLANDS BV8 citations79
US7394520B2Jul 1, 2008
Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lock
ASML NETHERLANDS BV10 citations79
US7123349B2Oct 17, 2006
Lithographic projection assembly, substrate handling apparatus and substrate handling method
ASML NETHERLANDS BV5 citations60
US7576831B2Aug 18, 2009
Method and apparatus for maintaining a machine part
ASML NETHERLANDS BV2 citations58