Inventor
KEIL DOUGLAS L
US9 patents
⚠️ This page may combine multiple inventors who share the name “KEIL DOUGLAS L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
6 patentsUS7413672B1Aug 19, 2008
Controlling plasma processing using parameters derived through the use of a planar ion flux probing arrangement
LAM RES CORP46 citations91
US7455748B2Nov 25, 2008
Magnetic enhancement for mechanical confinement of plasma
LAM RES CORP9 citations84
US7022611B1Apr 4, 2006
Plasma in-situ treatment of chemically amplified resist
LAM RES CORP14 citations84
US7347915B1Mar 25, 2008
Plasma in-situ treatment of chemically amplified resist
LAM RES CORP8 citations73
US6268260B1Jul 31, 2001
Methods of forming memory cell capacitor plates in memory cell capacitor structures
LAM RES CORP8 citations72
US7838086B2Nov 23, 2010
Magnetic enhancement for mechanical confinement of plasma
LAM RES CORP3 citations63
BOOTH JEAN-PAUL
2 patentsUS8164349B2Apr 24, 2012
Capacitively-coupled electrostatic (CCE) probe arrangement for detecting strike step in a plasma processing chamber and methods thereof
BOOTH JEAN-PAUL8 citations82
US8780522B2Jul 15, 2014
Capacitively-coupled electrostatic (CCE) probe arrangement for detecting dechucking in a plasma processing chamber and methods thereof
BOOTH JEAN-PAUL3 citations61