Inventor

YI SANG IN

US4 patents

⚠️ This page may combine multiple inventors who share the name “YI SANG IN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US7297376B1Nov 20, 2007

Method to reduce gas-phase reactions in a PECVD process with silicon and organic precursors to deposit defect-free initial layers

APPLIED MATERIALS INC33 citations90

US6638874B2Oct 28, 2003

Methods used in fabricating gates in integrated circuit device structures

APPLIED MATERIALS INC7 citations71

FOVELL RICHARD

1 patent

US8596336B2Dec 3, 2013

Substrate support temperature control

FOVELL RICHARD1 citations41

YI SANG IN

1 patent

US8702870B2Apr 22, 2014

Superimposition of rapid periodic and extensive post multiple substrate UV-ozone clean sequences for high throughput and stable substrate to substrate performance

YI SANG IN0 citations33