Inventor

CHEN CHIA-CHEN

TW82 patents

⚠️ This page may combine multiple inventors who share the name “CHEN CHIA-CHEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHEN CHIA-CHEN

TAIWAN SEMICONDUCTOR MFG CO LTD

Collector in an extreme ultraviolet lithography system with optimal air curtain protection

EUV focus monitoring systems and methods

Lithography system with an embedded cleaning module

EUV vessel inspection method and related system

Positioning device for aligning semiconductor tool and overhead hoist transport system

Method and apparatus for removing debris from collector

EUV light source and apparatus for lithography

EUV light source and apparatus for lithography

Droplet generator and method of servicing extreme ultraviolet radiation source apparatus

Droplet generator and method of servicing extreme ultraviolet radiation source apparatus

System and method for performing lithography process in semiconductor device fabrication

Particle removal system and method thereof

Method to mitigate defect printability for ID pattern

Rotary EUV collector

Method of overlay in extreme ultra-violet (EUV) lithography

EUV vessel inspection method and related system

System and method for photomask particle detection

Method to mitigate defect printability for ID pattern

Method of overlay in extreme ultra-violet (EUV) lithography

Exhaust system with U-shaped pipes

EUV light source and apparatus for lithography

Exhaust system with u-shaped pipes

Exhaust system with u-shaped pipes

Droplet generator and method of servicing extreme ultraviolet radiation source apparatus

Lithography system with an embedded cleaning module

EUV vessel inspection method and related system

Exhaust system with u-shaped pipes

System and method for performing lithography process in semiconductor device fabrication

IND TECH RES INST

Virtual image display apparatus

Three-dimensional surround scanning device and method thereof

Multilevel texture processing method for mapping multiple images onto 3D models

Device for acquiring depth image, calibrating method and measuring method therefor

Multilevel texture processing method for mapping multiple images onto 3D models

Three dimensional sensing method and three dimensional sensing apparatus

Ranging apparatus, ranging method, and interactive display system

INVENTEC PUDONG TECH CORP

Electronic apparatus

Portable electronic device

Image capturing assembly and electronic device including the same

Bendable device

TAIWAN SEMICONDUCTOR MFG

Collector in an extreme ultraviolet lithography system with optimal air curtain protection

Structure and method for reflective-type mask

UNITED MICROELECTRONICS CORP

Method to form an alignment mark

Method of improving alignment for semiconductor fabrication

TXC CORP

Oven controlled crystal oscillator consisting of heater-embedded ceramic package

Oven controlled crystal oscillator consisting of heater-embedded ceramic package

HSU CHIA-HAO

Method for extreme ultraviolet electrostatic chuck with reduced clamp effect

CHEN CHIA CHEN

Water kettle

CHEN CHIA-CHEN

Depth image acquiring device, system and method

WU JENG-FENG

3D object fabrication methods and systems

INVENTEC (PUDONG) TECH CORPORATION

Fan module