Inventor
SLONAKER STEVEN DOUGLAS
US6 patents
⚠️ This page may combine multiple inventors who share the name “SLONAKER STEVEN DOUGLAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
3 patentsUS10871708B2Dec 22, 2020
Spatial-frequency matched wafer alignment marks, wafer alignment and overlay measurement and processing using multiple different mark designs on a single layer
NIKON CORP2 citations69
US11061338B2Jul 13, 2021
High-resolution position encoder with image sensor and encoded target pattern
NIKON CORP3 citations65
US9639003B2May 2, 2017
Programmable imaging assembly for manufacturing biotest post arrays
NIKON CORP0 citations37