Inventor
FUNABASHI NAOKI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “FUNABASHI NAOKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
4 patentsUS10948829B2Mar 16, 2021
Pattern forming apparatus, alignment mark detection method, and pattern forming method
CANON KK2 citations66
US11774850B2Oct 3, 2023
Method for disposing substrate and method for manufacturing article
CANON KK0 citations45
US10431463B2Oct 1, 2019
Substrate holding device, lithography apparatus, and article production method
CANON KK0 citations45
US9740109B2Aug 22, 2017
Holding device, lithography apparatus, and method for manufacturing item
CANON KK1 citations45